30.1: Flexible Image Sensor Made of a-Si:H TFTs on Metal Foil

30.1: Flexible Image Sensor Made of a-Si:H TFTs on Metal Foil

We have developed a flexible image sensor using hydrogenated amorphous silicon thin film transistor (a‐Si:H TFT) on metal foil. The metal foil was treated by electrolytic polishing and thus its RMS surface roughness was reduced from 1205 to 71.6 Å. The sensor has 160 × 128 pixels, where a pixel has...

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Bibliographic Details
Published in:SID International Symposium Digest of technical papers Vol. 39; no. 1; pp. 419 - 421
Main Authors: Hur, Ji Ho, Kim, Hyo Jun, Lee, Eun Ho, Lee, Jung Woo, Hong, Soonwon, Lee, Donghoon, Kim, Se Hwan, Oh, Dong Hae, Jeong, Jun Young, Cheon, Jun Hyuk, Jang, Jin
Format: Journal Article
Language:English
Published: Oxford, UK Blackwell Publishing Ltd 01-05-2008
Online Access:Get full text
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Summary:We have developed a flexible image sensor using hydrogenated amorphous silicon thin film transistor (a‐Si:H TFT) on metal foil. The metal foil was treated by electrolytic polishing and thus its RMS surface roughness was reduced from 1205 to 71.6 Å. The sensor has 160 × 128 pixels, where a pixel has one switching TFT, one sensor TFT and a storage capacitor. A clear image was demonstrated on the metal foil using conventional pixel having two transistors and one cap.
Bibliography:ArticleID:SDTP1628
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istex:9DAAA80446A05FC6719014538AA0924BE2C4287B
ISSN:0097-966X
2168-0159
DOI:10.1889/1.3069687