Optimization of abrasive slurry assisted rotating ultrasonic machining for enhanced micro-channel fabrication on ceramic silicon wafer (111)

Optimization of abrasive slurry assisted rotating ultrasonic machining for enhanced micro-channel fabrication on ceramic silicon wafer (111)

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Bibliographic Details
Published in:Ceramics international
Main Authors: Vishnoi, Mohit, Srivastava, Siddharth, Gangadhar, Mamatha Theetha, Singh, Vikrant, Malik, Vansh, Bansal, Anuj
Format: Journal Article
Language:English
Published: 01-10-2024
Online Access:Get full text
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Description
ISSN:0272-8842
DOI:10.1016/j.ceramint.2024.10.083