Membrane-based scanning force microscopy

Phys. Rev. Applied 15, 021001 (2021) We report the development of a scanning force microscope based on an ultra-sensitive silicon nitride membrane transducer. Our development is made possible by inverting the standard microscope geometry - in our instrument, the substrate is vibrating and the scanni...

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Bibliographic Details

Main Authors:	Hälg, David, Gisler, Thomas, Tsaturyan, Yeghishe, Catalini, Letizia, Grob, Urs, Krass, Marc-Dominik, Héritier, Martin, Mattiat, Hinrich, Thamm, Ann-Katrin, Schirhagl, Romana, Langman, Eric C, Schliesser, Albert, Degen, Christian L, Eichler, Alexander
Format:	Journal Article
Language:	English
Published:	11-06-2020
Subjects:	Physics - Applied Physics Physics - Mesoscale and Nanoscale Physics
Online Access:	Get full text
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