Membrane-based scanning force microscopy

• Main Authors: Hälg, David, Gisler, Thomas, Tsaturyan, Yeghishe, Catalini, Letizia, Grob, Urs, Krass, Marc-Dominik, Héritier, Martin, Mattiat, Hinrich, Thamm, Ann-Katrin, Schirhagl, Romana, Langman, Eric C, Schliesser, Albert, Degen, Christian L, Eichler, Alexander
• Format: Journal Article
• Language: English
• Published: 11-06-2020
• Subjects: Physics - Applied Physics; Physics - Mesoscale and Nanoscale Physics
• DOI: 10.48550/arxiv.2006.06238

Phys. Rev. Applied 15, 021001 (2021) We report the development of a scanning force microscope based on an
ultra-sensitive silicon nitride membrane transducer. Our development is made
possible by inverting the standard microscope geometry - in our instrument, the
substrate is vibrating and the scanning tip is at rest. We present first
topography images of samples placed on the membrane surface. Our measurements
demonstrate that the membrane retains an excellent force sensitivity when
loaded with samples and in the presence of a scanning tip. We discuss the
prospects and limitations of our instrument as a quantum-limited force sensor
and imaging tool.