New Approaches to Nanofabrication: Molding, Printing, and Other Techniques
Gates et al focus on research published in nanofabrication during the interval from 1999 to mid-2004 and to specific techniques demonstrated to be capable of patterning a substrate with features less than or equal to 100 nm in both lateral and vertical dimensions. In general, this definition exclude...
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Published in: | Chemical reviews Vol. 105; no. 4; pp. 1171 - 1196 |
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Main Authors: | , , , , , |
Format: | Journal Article |
Language: | English |
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United States
American Chemical Society
01-04-2005
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Abstract | Gates et al focus on research published in nanofabrication during the interval from 1999 to mid-2004 and to specific techniques demonstrated to be capable of patterning a substrate with features less than or equal to 100 nm in both lateral and vertical dimensions. In general, this definition excludes techniques with control over nanoscale features in only one direction, such as the deposition of thin films. |
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AbstractList | Gates et al focus on research published in nanofabrication during the interval from 1999 to mid-2004 and to specific techniques demonstrated to be capable of patterning a substrate with features less than or equal to 100 nm in both lateral and vertical dimensions. In general, this definition excludes techniques with control over nanoscale features in only one direction, such as the deposition of thin films. |
Author | Willson, C. Grant Whitesides, George M Ryan, Declan Gates, Byron D Stewart, Michael Xu, Qiaobing |
Author_xml | – sequence: 1 givenname: Byron D surname: Gates fullname: Gates, Byron D – sequence: 2 givenname: Qiaobing surname: Xu fullname: Xu, Qiaobing – sequence: 3 givenname: Michael surname: Stewart fullname: Stewart, Michael – sequence: 4 givenname: Declan surname: Ryan fullname: Ryan, Declan – sequence: 5 givenname: C. Grant surname: Willson fullname: Willson, C. Grant – sequence: 6 givenname: George M surname: Whitesides fullname: Whitesides, George M |
BackLink | https://www.ncbi.nlm.nih.gov/pubmed/15826012$$D View this record in MEDLINE/PubMed |
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SubjectTerms | Membranes, Artificial Microscopy, Atomic Force - methods Microscopy, Electron, Scanning - methods Molds & molding Nanostructures - chemistry Nanotechnology Nanotechnology - methods Photography - methods Surface Properties Thin films |
Title | New Approaches to Nanofabrication: Molding, Printing, and Other Techniques |
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