New Approaches to Nanofabrication: Molding, Printing, and Other Techniques

Gates et al focus on research published in nanofabrication during the interval from 1999 to mid-2004 and to specific techniques demonstrated to be capable of patterning a substrate with features less than or equal to 100 nm in both lateral and vertical dimensions. In general, this definition exclude...

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Bibliographic Details
Published in:	Chemical reviews Vol. 105; no. 4; pp. 1171 - 1196
Main Authors:	Gates, Byron D, Xu, Qiaobing, Stewart, Michael, Ryan, Declan, Willson, C. Grant, Whitesides, George M
Format:	Journal Article
Language:	English
Published:	United States American Chemical Society 01-04-2005
Subjects:	Membranes, Artificial Microscopy, Atomic Force - methods Microscopy, Electron, Scanning - methods Molds & molding Nanostructures - chemistry Nanotechnology Nanotechnology - methods Photography - methods Surface Properties Thin films
Online Access:	Get full text
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Summary:	Gates et al focus on research published in nanofabrication during the interval from 1999 to mid-2004 and to specific techniques demonstrated to be capable of patterning a substrate with features less than or equal to 100 nm in both lateral and vertical dimensions. In general, this definition excludes techniques with control over nanoscale features in only one direction, such as the deposition of thin films.
Bibliography:	istex:8C2603705BFB8414E6D4F4781FC8B4E224C710B4 ark:/67375/TPS-R3RNZBXZ-2 ObjectType-Article-1 SourceType-Scholarly Journals-1 ObjectType-Feature-3 content type line 23 ObjectType-Review-2
ISSN:	0009-2665 1520-6890
DOI:	10.1021/cr030076o