Effective Method for Micro-Patterning Arene-Terminated Monolayers on a Si(111) Electrode

• Published in: Langmuir Vol. 32; no. 27; pp. 6825 - 6829
• Main Authors: Yamanoi, Yoshinori, Kobayashi, Tetsuhiro, Maeda, Hiroaki, Miyachi, Mariko, Ara, Masato, Tada, Hirokazu, Nishihara, Hiroshi
• Format: Journal Article
• Language: English
• Published: United States American Chemical Society 12-07-2016
• Subjects: Interfaces: Adsorption, Reactions, Films, Forces, Measurement Techniques, Charge Transfer, Electrochemistry, Electrocatalysis, Energy Production and Storage
• ISSN: 0743-7463; 1520-5827
• DOI: 10.1021/acs.langmuir.6b01370

Microstructured electrodes are significant to modern electrochemistry. A representative aromatic group, 4-ferrocenylphenyl one, was covalently bound to a micropatterned silicon electrode via the arylation of a hydrogen-terminated silicon(111) surface formed selectively on a Si wafer. Starting from a silicon(100)-on-insulator (SOI) wafer, the aromatic monolayer was attached sequentially by spin-coating a resist, electron beam lithography, Cr/Au deposition, lift-off, anisotropic etching with aqueous KOH solution, and Pd-catalyzed arylation. Cyclic voltammetry (CV) and X-ray photoelectron spectroscopy (XPS) are used to characterize the coupling reaction between 4-ferrocenyl group and silicon substrate, and to confirm performance of the final modified microsized electrode. These data show that this synthetic protocol gives chemically well-defined and robust functionalized monolayers on a silicon semiconducting surface with a small electrode.