Benzene Derivatives Analysis Using Aluminum Nitride Waveguide Raman Sensors

• Published in: Analytical chemistry (Washington) Vol. 92; no. 13; pp. 8917 - 8922
• Main Authors: Makela, Megan, Gordon, Paul, Tu, Dandan, Soliman, Cyril, Coté, Gerard L, Maitland, Kristen, Lin, Pao Tai
• Format: Journal Article
• Language: English
• Published: United States American Chemical Society 07-07-2020
• Subjects: Aluminum; Aluminum nitride; Analytical chemistry; Anisole; Benzene; Chemical compounds; Chemistry; CMOS; Evanescent waves; Functional groups; Hydrocarbons; Optical waveguides; Organic compounds; Raman spectra; Raman spectroscopy; Spectrum analysis; Toluene; Visible spectrum
• ISSN: 0003-2700; 1520-6882
• DOI: 10.1021/acs.analchem.0c00809

Raman spectroscopy using aluminum nitride (AlN) optical waveguides was demonstrated for organic compound analysis. The AlN waveguide device was prepared by reactive sputtering deposition and complementary-metal-oxide semiconductor (CMOS) processes. A fundamental waveguide mode was observed over a broad visible spectrum and the waveguide evanescent wave was used to excite the Raman signals of the test analytes. The performance of the waveguide sensor was characterized by measuring the Raman spectra of the benzene derivative mixtures consisting of benzene, anisole, and toluene. The compositions and concentrations were resolved by correlating the obtained Raman spectrum with the characteristic Raman peaks associated with C–C, C–H, and C–O functional groups. With the advantages of real-time detection and enhanced Raman signal intensity, the AlN waveguides provided a sensor platform for nondestructive and online chemical compound monitoring.