Oxidation of Dimethyl Sulfoxide in Aqueous Solution Using Microbubbles

A large quantity of dimethyl sulfoxide (DMSO) wastewater is discharged from washing and rinsing processes in semiconductor manufacturing industry. Traditional biological treatment is known to be difficult for the treatment of DMSO-containing wastewater because of odor problems. Ozonation of DMSO com...

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Bibliographic Details
Published in:Industrial & engineering chemistry research Vol. 48; no. 17; pp. 8048 - 8053
Main Authors: Li, Pan, Tsuge, Hideki, Itoh, Keiko
Format: Journal Article
Language:English
Published: Washington, DC American Chemical Society 02-09-2009
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Summary:A large quantity of dimethyl sulfoxide (DMSO) wastewater is discharged from washing and rinsing processes in semiconductor manufacturing industry. Traditional biological treatment is known to be difficult for the treatment of DMSO-containing wastewater because of odor problems. Ozonation of DMSO combined with a biological process is suggested to be a cost-efficient treatment solution, whereas the application of ozone to wastewater treatment has been limited by its low utilization efficiency and high cost. In this study, we applied an ozone microbubble generator to increase ozone transfer efficiency in the aqueous solution. The oxidation of DMSO by ozone microbubbles was investigated in a bubble column reactor with an inner diameter of 20 cm. We studied the dependence of DMSO degradation on the gas and liquid flow rates. Experimental results indicate that the ozonation of DMSO is a first-order mass-transfer-controlled reaction and the reaction rate constant increases with increasing gas velocity. Ozone transfer ratio increases with decrease in gas flow rate.
ISSN:0888-5885
1520-5045
DOI:10.1021/ie801565v