谐振微悬臂梁传感器的工作原理及其在生化检测中的研究进展
TP212; 谐振微悬臂梁是一种可以将质量变化转换为频率信号的微质量型传感器,因其分辨率高、灵敏度高、成本低、易于集成和小型化等优点而备受关注.谐振微悬臂梁现已被广泛应用于流量控制、生物医学痕量检测、气态和液态分子分析等领域.近年来,随着微机电系统(Micro-Electro-Mechanical System,MEMS)技术的快速发展,针对谐振式微悬臂梁传感器的研究与应用越来越多,对近年来谐振式微悬臂梁传感器在环境检测、生物医学等领域的具体应用进行了综述,并对未来的发展方向做出了展望....
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| Published in: | 电子技术应用 Vol. 49; no. 3; pp. 11 - 20 |
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| Main Authors: | , , , , , |
| Format: | Journal Article |
| Language: | Chinese |
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郑州轻工业大学材料与化学工程学院,河南郑州450002%中国科学院上海微系统与信息技术研究所传感技术国家重点实验室,上海200050
2023
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| Abstract | TP212; 谐振微悬臂梁是一种可以将质量变化转换为频率信号的微质量型传感器,因其分辨率高、灵敏度高、成本低、易于集成和小型化等优点而备受关注.谐振微悬臂梁现已被广泛应用于流量控制、生物医学痕量检测、气态和液态分子分析等领域.近年来,随着微机电系统(Micro-Electro-Mechanical System,MEMS)技术的快速发展,针对谐振式微悬臂梁传感器的研究与应用越来越多,对近年来谐振式微悬臂梁传感器在环境检测、生物医学等领域的具体应用进行了综述,并对未来的发展方向做出了展望. |
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| AbstractList | TP212; 谐振微悬臂梁是一种可以将质量变化转换为频率信号的微质量型传感器,因其分辨率高、灵敏度高、成本低、易于集成和小型化等优点而备受关注.谐振微悬臂梁现已被广泛应用于流量控制、生物医学痕量检测、气态和液态分子分析等领域.近年来,随着微机电系统(Micro-Electro-Mechanical System,MEMS)技术的快速发展,针对谐振式微悬臂梁传感器的研究与应用越来越多,对近年来谐振式微悬臂梁传感器在环境检测、生物医学等领域的具体应用进行了综述,并对未来的发展方向做出了展望. |
| Author | 田宽 孙雨安 许鹏程 闫堉琦 廉中义 陈滢 |
| AuthorAffiliation | 郑州轻工业大学材料与化学工程学院,河南郑州450002%中国科学院上海微系统与信息技术研究所传感技术国家重点实验室,上海200050 |
| AuthorAffiliation_xml | – name: 郑州轻工业大学材料与化学工程学院,河南郑州450002%中国科学院上海微系统与信息技术研究所传感技术国家重点实验室,上海200050 |
| Author_FL | Lian Zhongyi Chen Ying Yan Yuqi Sun Yu'an Xu Pengcheng Tian Kuan |
| Author_FL_xml | – sequence: 1 fullname: Tian Kuan – sequence: 2 fullname: Yan Yuqi – sequence: 3 fullname: Sun Yu'an – sequence: 4 fullname: Lian Zhongyi – sequence: 5 fullname: Chen Ying – sequence: 6 fullname: Xu Pengcheng |
| Author_xml | – sequence: 1 fullname: 田宽 – sequence: 2 fullname: 闫堉琦 – sequence: 3 fullname: 孙雨安 – sequence: 4 fullname: 廉中义 – sequence: 5 fullname: 陈滢 – sequence: 6 fullname: 许鹏程 |
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| Keywords | 生物医学 微悬臂梁 谐振式传感器 谐振频率 微机电系统 环境监测 |
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| Title | 谐振微悬臂梁传感器的工作原理及其在生化检测中的研究进展 |
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