Poly(Dimethylsiloxane) Waveguide Cantilevers for Optomechanical Sensing
The optical and structural properties of poly(dimethylsiloxane) (PDMS) are considered to define disposable cantilever-based micooptoelectromechanical systems (MOEMS) by ways of soft lithography and with a high degree of monolithic integration. The very low Youngas modulus of this material relaxes th...
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| Published in: | IEEE photonics technology letters Vol. 21; no. 2; pp. 79 - 81 |
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| Main Authors: | , , , , , , , |
| Format: | Journal Article |
| Language: | English |
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15-01-2009
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| Abstract | The optical and structural properties of poly(dimethylsiloxane) (PDMS) are considered to define disposable cantilever-based micooptoelectromechanical systems (MOEMS) by ways of soft lithography and with a high degree of monolithic integration. The very low Youngas modulus of this material relaxes the dimensionsa requirements, being then possible to define thick PDMS structures with a sensitivity comparable to nanometer scale silicon counterparts. Experimental results using a light-emitting diode working at 670 nm have determined the resonant frequencies of the proposed MOEMS and are in agreement with the numerical simulations done. Finally, when a 2-mu L droplet of ethanol (1.58 mg) is dispensed on the cantilever, relative losses rise to 25 dB, returning to its initial value when the droplet evaporates. |
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| AbstractList | The optical and structural properties of poly(dimethylsiloxane) (PDMS) are considered to define disposable cantilever-based micooptoelectromechanical systems (MOEMS) by ways of soft lithography and with a high degree of monolithic integration. The very low Youngas modulus of this material relaxes the dimensionsa requirements, being then possible to define thick PDMS structures with a sensitivity comparable to nanometer scale silicon counterparts. Experimental results using a light-emitting diode working at 670 nm have determined the resonant frequencies of the proposed MOEMS and are in agreement with the numerical simulations done. Finally, when a 2-mu L droplet of ethanol (1.58 mg) is dispensed on the cantilever, relative losses rise to 25 dB, returning to its initial value when the droplet evaporates. |
| Author | Zinoviev, K Llobera, A Dominguez, C Cadarso, V J Plaza, J A Buttgenbach, S Vila, J Biittgenbach, S |
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| Title | Poly(Dimethylsiloxane) Waveguide Cantilevers for Optomechanical Sensing |
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