Low temperature chemical vapour deposition of diamond on tungsten carbides using CF sub 4 gas doping for machine tool applications
The improvement is reported of the adhesion of CVD diamond films on WC-Co (6%) tools and the enhancement in the cutting tool lifetime by the introduction of CF sub 4 in the CH sub 4 /H sub 2 gas mixture. By the use of this halogen precursor it was possible to reduce the substrate temperature during...
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Published in: | Vacuum Vol. 46; no. 1; pp. 5 - 8 |
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Main Authors: | , , , , , |
Format: | Journal Article |
Language: | English |
Published: |
01-01-1995
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Online Access: | Get full text |
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