Crystalline quality and electrical properties of PbZr(x)Ti(1-x)O3 thin films prepared on SrTiO3-covered Si substrates

We report the crystalline quality and electrical properties of PbZr(x)Ti(1-x)O3 (PZT) films grown on Si substrates with a SrTiO3 (STO) buffer layer. STO buffer layers and PZT films were formed on Si substrates by the electronbeam assisted vacuum evaporation technique and the sol-gel technique, respe...

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Bibliographic Details

Published in:	Japanese Journal of Applied Physics Vol. 34; no. 9B; pp. 5202 - 5206
Main Authors:	Tokumitsu, Eisuke, Itani, Kensuke, Moon, Bum-Ki, Ishiwara, Hiroshi
Format:	Journal Article
Language:	English
Published:	01-09-1995
Online Access:	Get full text
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