Crystalline quality and electrical properties of PbZr(x)Ti(1-x)O3 thin films prepared on SrTiO3-covered Si substrates

• Published in: Japanese Journal of Applied Physics Vol. 34; no. 9B; pp. 5202 - 5206
• Main Authors: Tokumitsu, Eisuke, Itani, Kensuke, Moon, Bum-Ki, Ishiwara, Hiroshi
• Format: Journal Article
• Language: English
• Published: 01-09-1995
• ISSN: 0021-4922

We report the crystalline quality and electrical properties of PbZr(x)Ti(1-x)O3 (PZT) films grown on Si substrates with a SrTiO3 (STO) buffer layer. STO buffer layers and PZT films were formed on Si substrates by the electronbeam assisted vacuum evaporation technique and the sol-gel technique, respectively. It is shown that by using a thin (8 nm) metal Sr layer or fluoride (SrF2, GaF2) predeposition layers prior to the STO deposition, which reduces the SiO2 layer at the Si surface, highly oriented STO and PZT thin films can be grown on Si(100) and (111) substrates. Crystalline orientation of the PZT films strongly depends on the crystalline orientation of the STO buffer layers. It is also shown that the FWHM values of XRD peaks from PZT films are strongly related to those of STO buffer layers. Furthermore, the capacitance-voltage characteristics and current response measurements indicate the ferroelectric nature of PZT films grown on STO-covered Si substrates. (Author)