YBa2Cu3O7-x sputter deposition from rotatable targets: a scalable approach for YBa2Cu3 O7-x coated conductors

YBa2Cu3O7-x sputter deposition from rotatable targets: a scalable approach for YBa2Cu3 O7-x coated conductors

Rotatable magnetron sputter sources are however standard equipment in the large-scale sputter industry. [...] the development of sputter deposition from YBCO rotatable targets would facilitate the realization of a large-scale deposition process for YBCO coated conductor.

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Bibliographic Details
Published in:IEEE transactions on applied superconductivity Vol. 11; no. 1; p. 2909
Main Authors: Denul, J, De Winter, G, De Gryse, R
Format: Journal Article
Language:English
Published: New York The Institute of Electrical and Electronics Engineers, Inc. (IEEE) 01-02-2001
Online Access:Get full text
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Description
Summary:Rotatable magnetron sputter sources are however standard equipment in the large-scale sputter industry. [...] the development of sputter deposition from YBCO rotatable targets would facilitate the realization of a large-scale deposition process for YBCO coated conductor.
ISSN:1051-8223
1558-2515
DOI:10.1109/77.919671