Multi-walled microchannels: free-standing porous silicon membranes for use in [mu]TAS

Multi-walled microchannels: free-standing porous silicon membranes for use in [mu]TAS

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Bibliographic Details
Published in:Journal of microelectromechanical systems Vol. 9; no. 4; p. 495
Main Authors: Tjerkstra, R.W, Gardeniers, G.E, Kelly, J.J, van den Berg, A
Format: Journal Article
Language:English
Published: New York The Institute of Electrical and Electronics Engineers, Inc. (IEEE) 01-11-2000
Online Access:Get full text
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Description
ISSN:1057-7157
1941-0158
DOI:10.1109/84.896771