Influence of the seed layer on structural and electro-acoustic properties of sputter-deposited AIN resonators

• Published in: Thin solid films Vol. 517; no. 24; pp. 6588 - 6592
• Main Authors: RIEKKINEN, T, NURMELA, A, MOLARIUS, J, PENSALA, T, KOSTAMO, P, YLILAMMI, M, VAN DIJKEN, S
• Format: Journal Article
• Language: English
• Published: Amsterdam Elsevier 2009
• Subjects: Condensed matter: electronic structure, electrical, magnetic, and optical properties; Condensed matter: structure, mechanical and thermal properties; Cross-disciplinary physics: materials science; rheology; Deposition by sputtering; Dielectric, piezoelectric, ferroelectric and antiferroelectric materials; Dielectrics, piezoelectrics, and ferroelectrics and their properties; Exact sciences and technology; Materials science; Methods of deposition of films and coatings; film growth and epitaxy; Physics; Structure and morphology; thickness; Surfaces and interfaces; thin films and whiskers (structure and nonelectronic properties); Theory and models of film growth; Thin film structure and morphology; Crystal orientation; Surface morphology; Crystallization; Aluminium nitride; Crystal seeds; Layer thickness; Molybdenum; III-V compound; Sputtering; Columnar structure; Thin films; Piezoelectric materials; Quality factor; Piezoelectric effect; Growth mechanism; Physical vapor deposition; Titanium; Nickel; Reactive sputtering; Microstructure; Resonators; Acoustic waves; Crystal structure
• ISSN: 0040-6090; 1879-2731