Development and Experimental Validation of Automatic Conversion Procedure from Mechanical to Electrical Connection for MEMS Equivalent Circuit : Frontier in Sensors and Micromachines

• Published in: IEEJ transactions on electrical and electronic engineering Vol. 4; no. 3; pp. 353 - 357
• Main Authors: FUJIWARA, Nobuyo, ASAMI, Kazuo, IRIYE, Yasuroh, KOIKE, Tomoyuki, TSUCHIYA, Toshiyuki, HASHIGUCHI, Gen
• Format: Journal Article
• Language: English
• Published: Hoboken, NJ Wiley 2009
• Subjects: Applied sciences; Computer science; control theory; systems; Control theory. Systems; Electric connection. Cables. Wiring; Electric, optical and optoelectronic circuits; Electrical engineering. Electrical power engineering; Electronics; Exact sciences and technology; Micro- and nanoelectromechanical devices (mems/nems); Robotics; Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices; Theoretical study. Circuits analysis and design; Various equipment and components; Electromechanical device; Dynamic characteristic; Splice; Circuit simulation; Capacitive transducer; Precision engineering; Graph theory; Mechanical joint; Micromachine; comb-drive actuator; Electrical connection; behavior model; Interconnection; Resonance frequency; Integrated circuit; Equivalent circuit; Capacitive coupling; Electric motor; Electrostatic actuators; Microelectromechanical device; Electromechanical system
• ISSN: 1931-4973; 1931-4981