Spatial and Phase-Resolved Optical Emission Patterns in Capacitively Coupled Radio-Frequency Plasmas Images in Plasma Science

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Bibliographic Details
Published in:	IEEE transactions on plasma science Vol. 36; no. 4; pp. 1360 - 1361
Main Authors:	NEMSCHOKMICHAL, Sebastian, DITTMANN, Kristian, MEICHSNER, Jürgen
Format:	Journal Article
Language:	English
Published:	New York, NY Institute of Electrical and Electronics Engineers 2008
Subjects:	Electric discharges Exact sciences and technology Optical (ultraviolet, visible, infrared) measurements Other gas discharges Physics Physics of gases, plasmas and electric discharges Physics of plasmas and electric discharges Plasma diagnostic techniques and instrumentation Plasma interactions (nonlaser) Plasma sheaths Oxygen Emission spectroscopy gas discharges Hydrogen Experimental study Plasma sheaths plasma measurements Coupled plasma Gas discharge Plasma diagnostics Optical method optical spectroscopy Capacitive coupling Argon
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ISSN:	0093-3813 1939-9375