Electrical properties and poling of BaTiO[sub 3] thin films

• Published in: Applied physics letters Vol. 64:22
• Main Authors: Lu, H.A., Wills, L.A., Wessels, B.W.
• Format: Journal Article
• Language: English
• Published: United States 30-05-1994
• Subjects: 360606 - Other Materials- Physical Properties- (1992-); ALKALINE EARTH METAL COMPOUNDS; BARIUM COMPOUNDS; BARIUM OXIDES; CHALCOGENIDES; ELECTRICAL PROPERTIES; HYSTERESIS; MATERIALS SCIENCE; MICROSTRUCTURE; OXIDES; OXYGEN COMPOUNDS; PERMITTIVITY; PHYSICAL PROPERTIES; THIN FILMS; TITANIUM COMPOUNDS; TITANIUM OXIDES; TRANSITION ELEMENT COMPOUNDS
• ISSN: 0003-6951; 1077-3118
• DOI: 10.1063/1.111375

Dielectric and ferroelectric properties were measured for both highly [ital a]-axis textured and randomly oriented BaTiO[sub 3] thin films deposited on Pt coated MgO substrates via metal-organic chemical-vapor deposition. Dielectric constants on the order of [epsilon][similar to]10 and an absence of ferroelectric hysteresis were generally observed for the as-deposited films. Upon applying an electric field exceeding a threshold value of [similar to]50--100 kV/cm across the film, both the dielectric constant and the ferroelectric hystersis were enhanced significantly as a result of poling. The dielectric constant increased to [epsilon][similar to]100, and the spontaneous polarization of the [ital a]-axis textured film reached [ital P][sub [ital s]][ge]15 [mu]C/cm[sup 2]. The measured dielectric and ferroelectric properties of the BaTiO[sub 3] thin films depended on the microstructure of the films.