Modification of the Ferromagnetic Properties of Si{sub 1–x}Mn{sub x} Thin Films Synthesized by Pulsed Laser Deposition with a Variation in the Buffer-Gas Pressure

A series of thin films of Si{sub 1–x}Mn{sub x} alloys with a thickness from 50 to 100 nm grown by pulsed laser deposition on an Al{sub 2}O{sub 3} substrate in vacuum and in an argon atmosphere is investigated. The significant effect of the buffer-gas pressure in the sputtering chamber on the structu...

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Bibliographic Details

Published in:	Semiconductors (Woodbury, N.Y.) Vol. 52; no. 11
Main Authors:	Novodvorsky, O. A., Mikhalevsky, V. A., Gusev, D. S., Lotin, A. A., Parshina, L. S., Khramova, O. D., Cherebylo, E. A., Drovosekov, A. B., Rylkov, V. V., Nikolaev, S. N., Chernoglazov, K. Yu, Maslakov, K. I.
Format:	Journal Article
Language:	English
Published:	United States 15-11-2018
Subjects:	ALLOYS ALUMINIUM OXIDES ARGON CURIE POINT ENERGY BEAM DEPOSITION ENERGY DENSITY IONS LANGMUIR PROBE LASER RADIATION MATERIALS SCIENCE NEODYMIUM LASERS PULSED IRRADIATION THIN FILMS TIME-OF-FLIGHT METHOD
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