MEMS Pressure and Acceleration Sensors for Automotive Applications
This paper reviews MEMS product applications in a very demanding automotive environment. Our particular interest is in the MEMS inertial and pressure sensors. Specifics of transducer manufacturing technologies will be explained in details. Also advantages and disadvantages of piezoresistive versus c...
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| Published in: | SAE transactions Vol. 112; pp. 181 - 188 |
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| Main Authors: | , , |
| Format: | Journal Article |
| Language: | English |
| Published: |
Society of Automotive Engineers, Inc
01-01-2003
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| Online Access: | Get full text |
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