Wavelength tuning of photonic crystal waveguides fabricated using 248-nm deep UV lithography

Wavelength tuning of photonic crystal waveguides fabricated using 248-nm deep UV lithography

Wavelength tuning of characteristic features of straight photonic crystal waveguides has been obtained by varying the exposure dose in deep UV lithography. The experimental results agree very well with numerical simulations.

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Bibliographic Details
Published in:Optical Fiber Communication Conference, 2004. OFC 2004 Vol. 2; p. 3 pp. vol.2
Main Authors: Zhuang, Y.X., Frandsen, L.H., Harpoth, A., Thorhauge, M., Kristensen, M., Borel, P.I., Bogaerts, W., Baets, R.
Format: Conference Proceeding
Language:English
Published: IEEE 2004
Subjects:
Integrated optics
Lithography
Optical device fabrication
Optical devices
Optical fiber polarization
Optical filters
Optical planar waveguides
Optical waveguides
Photonic crystals
Tuning
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Description
Summary:Wavelength tuning of characteristic features of straight photonic crystal waveguides has been obtained by varying the exposure dose in deep UV lithography. The experimental results agree very well with numerical simulations.
ISBN:9781557527721
1557527725