Composition and optical properties of amorphous a-Si[O.sub.x]: H films with silicon nanoclusters
The phase composition and optical properties of hydrogenated amorphous films of silicon suboxide (a-Si[O.sub.x]:H) with silicon nanoclusters are studied. Ultrasoft X-ray emission spectroscopy show that silicon- suboxide films with various oxidation states and various amorphous silicon-cluster conten...
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| Published in: | Semiconductors (Woodbury, N.Y.) p. 212 |
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| Format: | Journal Article |
| Language: | English |
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Springer
01-02-2016
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| Abstract | The phase composition and optical properties of hydrogenated amorphous films of silicon suboxide (a-Si[O.sub.x]:H) with silicon nanoclusters are studied. Ultrasoft X-ray emission spectroscopy show that silicon- suboxide films with various oxidation states and various amorphous silicon-cluster contents can be grown using dc discharge modulation. In films with an ncl-Si content of ~50%, the optical-absorption edge is observed, whose extrapolation yields an optical band gap estimate of ~3.2-3.3 eV. In the visible region, rather intense photoluminescence bands are observed, whose peak positions indicate the formation of silicon nanoclusters 2.5-4.7 nm in size in these films, depending on the film composition. DOI: 10.1134/S1063782616020251 |
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| AbstractList | The phase composition and optical properties of hydrogenated amorphous films of silicon suboxide (a-Si[O.sub.x]:H) with silicon nanoclusters are studied. Ultrasoft X-ray emission spectroscopy show that silicon- suboxide films with various oxidation states and various amorphous silicon-cluster contents can be grown using dc discharge modulation. In films with an ncl-Si content of ~50%, the optical-absorption edge is observed, whose extrapolation yields an optical band gap estimate of ~3.2-3.3 eV. In the visible region, rather intense photoluminescence bands are observed, whose peak positions indicate the formation of silicon nanoclusters 2.5-4.7 nm in size in these films, depending on the film composition. DOI: 10.1134/S1063782616020251 |
| Audience | Academic |
| Author | Spirin, D.E Minakov, D.A Undalov, Yu. K Terukov, E.I Parinova, E.V Domashevskaya, E.P Terekhov, V.A Seredin, P.V |
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| DOI | 10.1134/S1063782616020251 |
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| Title | Composition and optical properties of amorphous a-Si[O.sub.x]: H films with silicon nanoclusters |
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