ORIGIN AND GROWTH KINETICS OF DENSE ANODIC ALUMINA

ORIGIN AND GROWTH KINETICS OF DENSE ANODIC ALUMINA

Grounds for the research presented and the technique for the recording of kinetic (polarization) dependencies of the initial (from -2 V) stage of the origin and growth of dense anodic alumina are discussed. An influence of the starting aluminum surface on the kinetics of the initial stage was determ...

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Bibliographic Details
Published in:Doklady Belorusskogo gosudarstvennogo universiteta informatiki i radioèlektroniki no. 7; pp. 12 - 17
Main Authors: V. A. Sokol, V. A. Yakovtseva, D. I. Chushkova
Format: Journal Article
Language:Russian
Published: Educational institution «Belarusian State University of Informatics and Radioelectronics 01-06-2019
Subjects:
алюминий
анодирование
микроэлектроника
плотный оксид
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Summary:Grounds for the research presented and the technique for the recording of kinetic (polarization) dependencies of the initial (from -2 V) stage of the origin and growth of dense anodic alumina are discussed. An influence of the starting aluminum surface on the kinetics of the initial stage was determined. The detailed analysis of various kinetic stages was made. Measurement results of the speci-fic capacity and its variation during the oxide film growth are submitted.
ISSN:1729-7648