Boosting Non-volatile Memory Performance with Exhalative Annealing: A Novel Approach to Low-Temperature Crystallization of Hafnia Based Ferroelectric

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Bibliographic Details
Published in:	Materials today. Nano p. 100546
Main Authors:	Lee, Yunseong, Kim, Un Jeong, Kim, Kihong, Yun, Dong-Jin, Choe, Duk-hyun, Yoo, Sijung, Lee, Hyun Jae, Nam, Seung-Geol, Jo, Sanghyun, Park, Yoonsang, Kim, Donghoon, Kim, Dongmin, Kim, Haeryong, Shin, Keunwook, Nahm, Sahn, Heo, Jinseong
Format:	Journal Article
Language:	English
Published:	01-11-2024
Online Access:	Get full text
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