Monitoring of the process of formation of epitaxial films with the use of ultrasoft x-ray spectroscopy

Monitoring of the process of formation of epitaxial films with the use of ultrasoft x-ray spectroscopy

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Bibliographic Details
Published in:Journal of applied spectroscopy Vol. 67; no. 4; pp. 682 - 686
Main Authors: Kozhakhmetov, S. K., Kozhakhmetova, T. A.
Format: Journal Article
Language:English
Published: 01-07-2000
Online Access:Get full text
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Description
ISSN:0021-9037
1573-8647
DOI:10.1007/BF02681304