On the sensing gas properties of titanium dioxide films

In this paper we investigate the gas sensing properties of undoped and Pd-doped TiO2 thin films obtained by a sol-gel method onto glass and silicon substrates. The sensitivity of these films and the optimum operating temperature were studied for some reducing gases (methane, acetone, ethanol, formal...

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Bibliographic Details
Published in:	Journal of Optoelectronics and Advanced Materials Vol. 10; no. 9; pp. 2363 - 2366
Main Authors:	Iftimie, N, Crisan, M, Braileanu, A, Crisan, D, Nastuta, A, Rusu, G B, Popa, P D, Mardare, D
Format:	Journal Article
Language:	English
Published:	01-09-2008
Online Access:	Get full text
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Summary:	In this paper we investigate the gas sensing properties of undoped and Pd-doped TiO2 thin films obtained by a sol-gel method onto glass and silicon substrates. The sensitivity of these films and the optimum operating temperature were studied for some reducing gases (methane, acetone, ethanol, formaldehyde and liquefied petroleum gas - LPG). Pd-doping (0.5wt.%) induces an increase of the weight percentage of the anatase phase from 74% to 94% and a decrease of both anatase and rutile crystallinity. Films deposited onto glass substrates are almost three times rougher than their counterparts deposited onto silicon substrates. All the studied films are most sensitive to formaldehyde, with a special remark for the Pd-doped ones deposited onto silicon substrates.
Bibliography:	ObjectType-Article-2 SourceType-Scholarly Journals-1 ObjectType-Feature-1 content type line 23
ISSN:	1454-4164