Submicron secondary ion mass spectrometer for three-dimensional analysis of microstructure

Submicron secondary ion mass spectrometer for three-dimensional analysis of microstructure

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Bibliographic Details
Published in:Analytical sciences Vol. 7; no. 1; pp. 527 - 532
Main Authors: NIHEI, Y, SATOH, H, TOMIYASU, B, OWARI, M
Format: Conference Proceeding
Language:English
Published: Tokyo Japan Society for Analytical Chemistry 1991
Subjects:
Analytical chemistry
Chemistry
Exact sciences and technology
General, instrumentation
Online Access:Get full text
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ISSN:0910-6340
1348-2246