Continuous and agile beam steerable diode lasers
Summary from only given. This paper demonstrates the first monolithically fabricated laser beam steering device based on GaAs-based MEMS. Since the laser and actuator are monolithically integrated, this device can be potentially cost effective and scalable. Other GaAs-based devices integrated with M...
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Published in: | Summaries of Papers Presented at the Lasers and Electro-Optics. CLEO '02. Technical Diges pp. 69 - 70 vol.1 |
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Main Authors: | , , , , |
Format: | Conference Proceeding |
Language: | English |
Published: |
IEEE
2002
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Subjects: | |
Online Access: | Get full text |
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Summary: | Summary from only given. This paper demonstrates the first monolithically fabricated laser beam steering device based on GaAs-based MEMS. Since the laser and actuator are monolithically integrated, this device can be potentially cost effective and scalable. Other GaAs-based devices integrated with MEMS have been reported. This paper represents the first integration with an edge-emitting laser. |
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ISBN: | 1557527067 9781557527066 |
DOI: | 10.1109/CLEO.2002.1033443 |