Time of flight image sensor with 7um pixel and 640×480 resolution

Time of flight image sensor with 7um pixel and 640×480 resolution

Time of flight (ToF) sensor with pixel size of 7×7um and VGA resolution is developed using a backside illumination (BSI) structure. Quantum efficiency (QE) of near infrared (NIR) light is improved dramatically by applying thick epitaxial layer, reflection metal and anti-reflection layer. The depth e...

Full description

Saved in:
Bibliographic Details
Published in:2013 Symposium on VLSI Technology pp. T146 - T147
Main Authors: Seounghyun Kim, Seungwon Cha, Heewoo Park, Jooyeong Gong, Yohwan Noh, Wanghyun Kim, Seunghoon Lee, Dong-Ki Min, Wonjoo Kim, Tae-Chan Kim, Eunseung Jung
Format: Conference Proceeding
Language:English
Published: IEEE 01-06-2013
Subjects:
Adaptive optics
Image sensors
Light emitting diodes
Metals
Optical sensors
Reflection
Silicon
Online Access:Get full text
Tags: Add Tag
No Tags, Be the first to tag this record!
Abstract Time of flight (ToF) sensor with pixel size of 7×7um and VGA resolution is developed using a backside illumination (BSI) structure. Quantum efficiency (QE) of near infrared (NIR) light is improved dramatically by applying thick epitaxial layer, reflection metal and anti-reflection layer. The depth error ranges are 2cm and 10cm at 90% and 10% reflection condition at the distance of 7m, respectively.
AbstractList Time of flight (ToF) sensor with pixel size of 7×7um and VGA resolution is developed using a backside illumination (BSI) structure. Quantum efficiency (QE) of near infrared (NIR) light is improved dramatically by applying thick epitaxial layer, reflection metal and anti-reflection layer. The depth error ranges are 2cm and 10cm at 90% and 10% reflection condition at the distance of 7m, respectively.
Author Jooyeong Gong
Yohwan Noh
Eunseung Jung
Wanghyun Kim
Seounghyun Kim
Heewoo Park
Seungwon Cha
Dong-Ki Min
Tae-Chan Kim
Seunghoon Lee
Wonjoo Kim
Author_xml – sequence: 1
  surname: Seounghyun Kim
  fullname: Seounghyun Kim
  email: sh0243.kim@samsung.com
  organization: Semicond. R&D Center, Samsung Electron. Co., Ltd., Hwasung, South Korea
– sequence: 2
  surname: Seungwon Cha
  fullname: Seungwon Cha
  organization: Semicond. R&D Center, Samsung Electron. Co., Ltd., Hwasung, South Korea
– sequence: 3
  surname: Heewoo Park
  fullname: Heewoo Park
  organization: Semicond. R&D Center, Samsung Electron. Co., Ltd., Hwasung, South Korea
– sequence: 4
  surname: Jooyeong Gong
  fullname: Jooyeong Gong
  organization: Semicond. R&D Center, Samsung Electron. Co., Ltd., Hwasung, South Korea
– sequence: 5
  surname: Yohwan Noh
  fullname: Yohwan Noh
  organization: Semicond. R&D Center, Samsung Electron. Co., Ltd., Hwasung, South Korea
– sequence: 6
  surname: Wanghyun Kim
  fullname: Wanghyun Kim
  organization: Semicond. R&D Center, Samsung Electron. Co., Ltd., Hwasung, South Korea
– sequence: 7
  surname: Seunghoon Lee
  fullname: Seunghoon Lee
  organization: Semicond. R&D Center, Samsung Electron. Co., Ltd., Hwasung, South Korea
– sequence: 8
  surname: Dong-Ki Min
  fullname: Dong-Ki Min
  organization: Semicond. R&D Center, Samsung Electron. Co., Ltd., Hwasung, South Korea
– sequence: 9
  surname: Wonjoo Kim
  fullname: Wonjoo Kim
  organization: Semicond. R&D Center, Samsung Electron. Co., Ltd., Hwasung, South Korea
– sequence: 10
  surname: Tae-Chan Kim
  fullname: Tae-Chan Kim
  organization: S.LSI Div., Samsung Electron. Co., Ltd., South Korea
– sequence: 11
  surname: Eunseung Jung
  fullname: Eunseung Jung
  organization: Semicond. R&D Center, Samsung Electron. Co., Ltd., Hwasung, South Korea
BookMark eNotjs1KAzEURiNWsK19Ajd5gYGbv3uTpRarQsHN7Esmk2kj81MmU9Qn6QP5YhZ18XE4m8O3YLN-6OMVWzmy2qLSVmmi618XGkkZKRFmbA6kVSEMylu2yPkdQIJRds4ey9RFPjS8adP-MPHU-X3kOfZ5GPlHmg6cTh0_ps_Yct_XHDV8n7UFPsY8tKcpDf0du2l8m-Pqn0tWbp7K9UuxfXt-XT9si-RgKsgIESuwChwJChQ81NZ7NNhYktqLUF_mUCpXCYIGlcVQ1a6mCkLwQS3Z_V82xRh3x_HydPzaoSFEZdQPtbJIYQ
ContentType Conference Proceeding
DBID 6IE
6IH
CBEJK
RIE
RIO
DatabaseName IEEE Electronic Library (IEL) Conference Proceedings
IEEE Proceedings Order Plan (POP) 1998-present by volume
IEEE Xplore All Conference Proceedings
IEEE Electronic Library Online
IEEE Proceedings Order Plans (POP) 1998-present
DatabaseTitleList
Database_xml – sequence: 1
  dbid: RIE
  name: IEEE Electronic Library Online
  url: http://ieeexplore.ieee.org/Xplore/DynWel.jsp
  sourceTypes: Publisher
DeliveryMethod fulltext_linktorsrc
Discipline Engineering
EISBN 9784863483477
4863483473
EndPage T147
ExternalDocumentID 6576635
Genre orig-research
GroupedDBID 29G
6IE
6IH
AI.
ALMA_UNASSIGNED_HOLDINGS
CBEJK
JC5
RIE
RIG
RIO
RNS
VH1
ID FETCH-LOGICAL-i90t-7511eb08309717c7ca0d8aa656f8724a1cda1c96239b170f6386cbd9d7b0ccac3
IEDL.DBID RIE
ISBN 9781467352260
1467352268
ISSN 0743-1562
IngestDate Wed Jun 26 19:24:49 EDT 2024
IsPeerReviewed false
IsScholarly true
Language English
LinkModel DirectLink
MergedId FETCHMERGED-LOGICAL-i90t-7511eb08309717c7ca0d8aa656f8724a1cda1c96239b170f6386cbd9d7b0ccac3
ParticipantIDs ieee_primary_6576635
PublicationCentury 2000
PublicationDate 2013-June
PublicationDateYYYYMMDD 2013-06-01
PublicationDate_xml – month: 06
  year: 2013
  text: 2013-June
PublicationDecade 2010
PublicationTitle 2013 Symposium on VLSI Technology
PublicationTitleAbbrev VLSIT
PublicationYear 2013
Publisher IEEE
Publisher_xml – name: IEEE
SSID ssj0020538
ssj0001107092
ssj0001968074
Score 1.9376225
Snippet Time of flight (ToF) sensor with pixel size of 7×7um and VGA resolution is developed using a backside illumination (BSI) structure. Quantum efficiency (QE) of...
SourceID ieee
SourceType Publisher
StartPage T146
SubjectTerms Adaptive optics
Image sensors
Light emitting diodes
Metals
Optical sensors
Reflection
Silicon
Title Time of flight image sensor with 7um pixel and 640×480 resolution
URI https://ieeexplore.ieee.org/document/6576635
hasFullText 1
inHoldings 1
isFullTextHit
isPrint
link http://sdu.summon.serialssolutions.com/2.0.0/link/0/eLvHCXMwlV09T8MwED3RTrDw0SK-5YERg9OmOXsFWnVCSHRgq-IvqahNqraR-Cf8IP4Y5ySkILEwRIozRT4n997Z7x3AtUTtIoUpj6WWPPbOc03sh6ORPjHaJl4FNfL4BZ9e5eMw2OTcNFoY51x5-MzdhttyL9_mpgilsruEwDElyBa0UMlKq7WtpxCPEfUO4Vtl-1L5vNTkixabbCw5KemXIq8ES_whv72f6rH41WqlzDSj_f-94wF0t5I99twko0PYcdkR7P1wG-zAfZB7sNwzPw-MnM0W9C9ha-Kx-YqFeizDYsGWs3c3Z2lmWRKLz49YCkaMvF6gXZiMhpOHMa9bKPCZEhuOBKecJpQVnKLQoEmFlWlKGM5L7MVpZCxdiiCQ0hEKTx9jCJCyqAWF1vSPoZ3lmTsBJrSRRkcDNARivHFK0Si2rq_1QDljT6ETJmO6rEwypvU8nP39-Bx2e1VfCS6iC2hvVoW7hNbaFldlWL8AS-id1A
link.rule.ids 310,311,782,786,791,792,798,54767
linkProvider IEEE
linkToHtml http://sdu.summon.serialssolutions.com/2.0.0/link/0/eLvHCXMwlV3LTsJAFJ0ILtSNDzD4noVLR6dQeme2KgQjEhNZuCOdV4KBlgBN_BM_yB_zTltBEzcumnS6auZOe8-5M-dcQi4FKBtIiFkolGChs44pZD8MtHCRViZy0quRey8weBX3HW-Tc7XSwlhr88Nn9trf5nv5JtWZL5XdRAiOMUFWyGY7hAgKtda6ooJMhpd7hG-F8Uvh9FLSL1xuYmXKiWk_l3lFkCMQ8e3-VI75r2Yrea7p7v7vLfdIfS3ao8-rdLRPNmxyQHZ--A3WyK0XfNDUUTfxnJyOp_g3oQtksumc-ooshWxKZ-N3O6FxYmgU8s-PUHCKnLxconUy7HaGdz1WNlFgY8mXDBBQWYU4y3tFgQYdcyPiGFGcE9AM40AbvCSCIKkC4A4_Rx8iaUBxDK5uHZJqkia2QShXWmgVtEEjjHHaSomj0NiWUm1ptTkiNT8Zo1lhkzEq5-H478cXZKs3fOqP-g-DxxOy3Sy6TDAenJLqcp7ZM1JZmOw8D_EX0uuhJQ
openUrl ctx_ver=Z39.88-2004&ctx_enc=info%3Aofi%2Fenc%3AUTF-8&rfr_id=info%3Asid%2Fsummon.serialssolutions.com&rft_val_fmt=info%3Aofi%2Ffmt%3Akev%3Amtx%3Abook&rft.genre=proceeding&rft.title=2013+Symposium+on+VLSI+Technology&rft.atitle=Time+of+flight+image+sensor+with+7um+pixel+and+640%C3%97480+resolution&rft.au=Seounghyun+Kim&rft.au=Seungwon+Cha&rft.au=Heewoo+Park&rft.au=Jooyeong+Gong&rft.date=2013-06-01&rft.pub=IEEE&rft.isbn=9781467352260&rft.issn=0743-1562&rft.spage=T146&rft.epage=T147&rft.externalDocID=6576635
thumbnail_l http://covers-cdn.summon.serialssolutions.com/index.aspx?isbn=/lc.gif&issn=0743-1562&client=summon
thumbnail_m http://covers-cdn.summon.serialssolutions.com/index.aspx?isbn=/mc.gif&issn=0743-1562&client=summon
thumbnail_s http://covers-cdn.summon.serialssolutions.com/index.aspx?isbn=/sc.gif&issn=0743-1562&client=summon