A 9.1 mW inductive displacement-to-digital converter with 1.85 nm resolution

A 9.1 mW inductive displacement-to-digital converter with 1.85 nm resolution

A displacement-to-digital converter (DDC) based on inductive (eddy-current) sensor is presented. The sensor is embedded in a self-oscillating front-end, whose 145MHz output is then digitized by a ratiometric ΔΣ ADC. Over a 10μm range, the DDC achieves 1.85nm resolution (1.02 pH), in a 2kHz bandwidth...

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Bibliographic Details
Published in:2017 Symposium on VLSI Circuits pp. C80 - C81
Main Authors: Chaturvedi, Vikram, Vogel, Johan G., Makinwa, Kofi A. A., Nihtianov, Stoyan
Format: Conference Proceeding
Language:English
Published: JSAP 01-06-2017
Subjects:
ADC
Bandwidth
Capacitors
chopping
Clocks
Coils
delta
displacement
eddy-current
Inductance
oscillator
Oscillators
precision
sensor
sigma
System-on-chip
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Description
Summary:A displacement-to-digital converter (DDC) based on inductive (eddy-current) sensor is presented. The sensor is embedded in a self-oscillating front-end, whose 145MHz output is then digitized by a ratiometric ΔΣ ADC. Over a 10μm range, the DDC achieves 1.85nm resolution (1.02 pH), in a 2kHz bandwidth. It draws 9.1mW from a 1.8 V supply making it the most energy-efficient ECS interface ever reported.
DOI:10.23919/VLSIC.2017.8008556