Measurement of MEMS displacements and frequencies using laser interferometry

• Published in: Engineering Solutions for the Next Millennium. 1999 IEEE Canadian Conference on Electrical and Computer Engineering (Cat. No.99TH8411) Vol. 3; pp. 1680 - 1685 vol.3
• Main Authors: Wylde, J., Hubbard, T.J.
• Format: Conference Proceeding
• Language: English
• Published: IEEE 1999
• Subjects: Displacement measurement; Frequency measurement; Interferometry; Laser beams; Lenses; Mechanical engineering; Microelectromechanical systems; Micromechanical devices; Semiconductor device measurement; Vibration measurement
• ISBN: 0780355792; 9780780355798
• ISSN: 0840-7789; 2576-7046
• DOI: 10.1109/CCECE.1999.804970

This paper will present an interferometric technique for determining the displacement and vibration of micromachined beams. A modified Michelson-Morley interferometer, which was used to measure submicron displacements of micro-devices is described. An analytical solution of the expected signal behaviour is presented. Experimental responses were found to compare well with expected responses.