A class of silicon micromachined metasurface for the design of high-gain terahertz antennas

A class of silicon micromachined metasurface for the design of high-gain terahertz antennas

We explore the use of a class of metasurface (MTS), which consists of metalized cylinders arranged in a square lattice and placed on a ground plane, for the realization of antennas at terahertz (THz) frequencies. This MTS is particularly appropriate for being micromachined out of a silicon wafer by...

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Bibliographic Details
Published in:2016 IEEE International Symposium on Antennas and Propagation (APSURSI) pp. 1191 - 1192
Main Authors: Gonzalez-Ovejero, David, Reck, Theodore J., Jung-Kubiak, Cecile D., Alonso-DelPino, Maria, Chattopadhyay, Goutam
Format: Conference Proceeding
Language:English
Published: IEEE 01-06-2016
Subjects:
Antennas
Etching
Modulation
Silicon
Surface impedance
Surface waves
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Summary:We explore the use of a class of metasurface (MTS), which consists of metalized cylinders arranged in a square lattice and placed on a ground plane, for the realization of antennas at terahertz (THz) frequencies. This MTS is particularly appropriate for being micromachined out of a silicon wafer by means of deep reactive ion etching (DRIE).
ISSN:1947-1491
DOI:10.1109/APS.2016.7696303