Generating Cycle Time-Throughput Curves using Effective Process Time based Aggregate Modeling

In semiconductor manufacturing, cycle time-throughput (CT-TH) curves are often used to make a trade-off between throughput and mean cycle time of bottleneck workstations. To generate CT-TH curves, detailed simulation models, and analytical queueing approximations are typically used. However, detaile...

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Bibliographic Details

Published in:	2008 IEEE/SEMI Advanced Semiconductor Manufacturing Conference pp. 127 - 133
Main Authors:	Veeger, C.P.L., Etman, L.F.P., van Herk, J., Rooda, J.E.
Format:	Conference Proceeding
Language:	English
Published:	IEEE 01-05-2008
Subjects:	Aggregates Analytical models CT-TH curves cycle time factory dynamics manufac-turing performance Production facilities Queueing analysis Semiconductor device manufacture Semiconductor device modeling simulation Tellurium Throughput Virtual manufacturing Workstations
Online Access:	Get full text
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