Micromachined silicon radiation sensors - Part 1: Design and experimental characterization

Micromachined silicon radiation sensors - Part 1: Design and experimental characterization

Silicon radiation sensors fabricated with micromachining technologies offer a number of advantages compared to their planar counterparts, making them appealing for an increasing number of applications. This paper provides an overview of the most interesting developments in this field by Fondazione B...

Full description

Saved in:
Bibliographic Details
Published in:2015 XVIII AISEM Annual Conference pp. 1 - 4
Main Authors: Bagolini, A., Boscardin, M., Conci, P., Crivellari, M., Giacomini, G., Mattedi, F., Piemonte, C., Ronchin, S., Zorzi, N., Benkechkache, M. A., Dalla Betta, G.-F, Mendicino, R., Pancheri, L., Povoli, M., Sultan, D. M. S.
Format: Conference Proceeding
Language:English
Published: IEEE 01-02-2015
Subjects:
3D sensors
Cavity resonators
Detectors
micromachining
Neutrons
Sensor phenomena and characterization
Silicon
silicon radiation sensor
TCAD simulations
Three-dimensional displays
Online Access:Get full text
Tags: Add Tag
No Tags, Be the first to tag this record!
Description
Summary:Silicon radiation sensors fabricated with micromachining technologies offer a number of advantages compared to their planar counterparts, making them appealing for an increasing number of applications. This paper provides an overview of the most interesting developments in this field by Fondazione Bruno Kessler in collaboration with the University of Trento.
DOI:10.1109/AISEM.2015.7066825