Micromachined silicon radiation sensors - Part 2: Fabrication technologies

The aim of this work is to present the main technological developments carried out at FBK for micro machined radiation sensors used in High Energy Physics (HEP) experiments. We report on the main technological issues to integrate silicon etching (wet and dry) techniques in the fabrication flow for s...

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Bibliographic Details
Published in:	2015 XVIII AISEM Annual Conference pp. 1 - 4
Main Authors:	Bagolini, A., Boscardin, M., Conci, P., Crivellari, M., Giacomini, G., Mattedi, F., Piemonte, C., Ronchin, S., Zorzi, N., Benkechkache, M. A., Dalla Betta, G-F, Mendicino, R., Pancheri, L., Povoli, M., Sultan, D. M. S.
Format:	Conference Proceeding
Language:	English
Published:	IEEE 01-02-2015
Subjects:	Detectors DRIE Etching High Energy Physics Image edge detection Micromachining Neutrons Silicon silicon detectors Three-dimensional displays
Online Access:	Get full text
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Summary:	The aim of this work is to present the main technological developments carried out at FBK for micro machined radiation sensors used in High Energy Physics (HEP) experiments. We report on the main technological issues to integrate silicon etching (wet and dry) techniques in the fabrication flow for silicon detector and we show some examples of innovative detectors realized by means of these technologies.
DOI:	10.1109/AISEM.2015.7066822