RF Reflectometry of NEMS Motional Capacitance with Micromanipulator Probe

• Published in: 2022 IEEE Silicon Nanoelectronics Workshop (SNW) pp. 1 - 2
• Main Authors: Celis-Cordova, Rene, Williams, Ethan M., Cayaspo, Gabriel J. Quintero, Gose, Jacob J., Brown, Abigail F., Chisum, Jonathan D., Orlov, Alexei O., Snider, Gregory L.
• Format: Conference Proceeding
• Language: English
• Published: IEEE 11-06-2022
• DOI: 10.1109/SNW56633.2022.9889036
• EISSN: 2161-4644

Adiabatic reversible computing can dramatically reduce heat generation by switching circuits slowly, relative to their RC time constants, and using reversible logic. Nano-electro-mechanical systems (NEMS) are a promising approach to implement reversible computing as they don't have leakage current and can be used as pull-up and pull-down networks to generate digital gates. We present the measurement of NEMS motional capacitance devices with radio frequency (RF) reflectometry using a micromanipulator probe. The probe includes an on-board matching network that can be tuned to match the impedance of the NEMS devices under test. The NEMS are operated with a DC gate voltage and the reflectometry measurements verify their functionality paving the way for adiabatic reversible computing.