An Energy Harvesting MEMS Frequency Detector

• Published in: 2007 IEEE Sensors pp. 1460 - 1463
• Main Authors: Sari, I., Balkan, T., Kulah, H.
• Format: Conference Proceeding
• Language: English
• Published: IEEE 01-10-2007
• Subjects: Coils; Detectors; Electromagnetic induction; Frequency; Induction generators; Magnetic sensors; Micromechanical devices; Readout electronics; Voltage; Wideband
• ISBN: 1424412617; 9781424412617
• ISSN: 1930-0395; 2168-9229
• DOI: 10.1109/ICSENS.2007.4388689

This paper presents an energy harvesting electromagnetic MEMS sensor that can detect the frequency of environmental vibrations. The device is composed of a number of serially connected coils that are fabricated on parylene cantilevers in different lengths, and can output the frequency content of ambient vibrations while harvesting electrical energy in a wide band of predetermined frequency range (3.7-4.7 kHz). The sensor generates an output voltage at the ambient vibration frequency by virtue of the relative motion of the cantilevers with respect to a magnet through electromagnetic induction. The induced voltage is processed by readout electronics to extract the frequency information. The sensor also scavenges energy that can be used to increase the life-time of the power supply of the readout electronics.