Mass sensitivity evaluation of a Love wave sensor using the 3D Finite Element Method

• Published in: 2010 IEEE International Frequency Control Symposium pp. 228 - 231
• Main Authors: Rocha-Gaso, M.-I, Fernández-Díaz, R, Arnau-Vives, A, March-Iborra, C
• Format: Conference Proceeding
• Language: English
• Published: IEEE 01-06-2010
• Subjects: Computational modeling; Fingers; Finite element methods; Sensitivity; Sensors; Surface acoustic wave devices
• ISBN: 1424463998; 9781424463992
• ISSN: 2327-1914
• DOI: 10.1109/FREQ.2010.5556338

The present paper describes a novel approach to evaluate the mass sensitivity of a Love wave (LW) sensor. A ZnO/XY LiNbO3 delay line based device with a sensing film was modeled and simulated applying the 3D- Finite Element Method (FEM). The radio frequency signal delays due to the thickness changes induced to the sensing film were registered and measured at the output Interdigital Transducer (IDT). The time delays were associated with phase shifts to determine the phase sensitivity of the sensor. A phase sensitivity of 600 [cm 2 /g] was obtained, which is in good agreement with literature.