Voltage Elevator using a MEMS Resonator

Voltage Elevator using a MEMS Resonator

This paper proposes a new approach to realize a voltage elevator using a single MEMS capacitor with movable plates. This device works in resonant mode, and this feature allows for the use of low input voltage. Complete electrical and mechanical equivalent SIMULINK models have been designed. The simu...

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Bibliographic Details
Published in:2007 IEEE International Symposium on Circuits and Systems (ISCAS) pp. 3574 - 3577
Main Author: Quero, Jose M.
Format: Conference Proceeding
Language:English
Published: IEEE 01-05-2007
Subjects:
Actuators
Analytical models
Capacitors
Electronic circuits
Elevators
Low voltage
Micromechanical devices
Resonance
Springs
Switches
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Summary:This paper proposes a new approach to realize a voltage elevator using a single MEMS capacitor with movable plates. This device works in resonant mode, and this feature allows for the use of low input voltage. Complete electrical and mechanical equivalent SIMULINK models have been designed. The simulation results provide full analysis of its complex chaotic behavior. Design criteria are deduced for a specific application.
ISBN:1424409209
9781424409204
ISSN:0271-4302
2158-1525
DOI:10.1109/ISCAS.2007.378455