Transparent SU-8 Three-Axis Micro Strain Gauge Force Sensing Pillar Arrays for Biological Applications
This paper presents three-axis micro strain gauge force-sensitive pillar arrays constructed of multiple layers of SU-8 and metal on quartz substrates to create transparent sensors for use in standard inverted microscopes. The sensor meets specific requirements for measuring tactile sensitivity and f...
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| Published in: | TRANSDUCERS 2007 - 2007 International Solid-State Sensors, Actuators and Microsystems Conference pp. 2259 - 2262 |
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| Main Authors: | , , , , |
| Format: | Conference Proceeding |
| Language: | English |
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IEEE
01-06-2007
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| Abstract | This paper presents three-axis micro strain gauge force-sensitive pillar arrays constructed of multiple layers of SU-8 and metal on quartz substrates to create transparent sensors for use in standard inverted microscopes. The sensor meets specific requirements for measuring tactile sensitivity and forces exerted during locomotion by small organisms such as fruit flies ( Drosophila melanogaster ), including: 1μN force sensitivity, >25μN range, and bio-compatibility By virtue of its three-axis capability, this sensor has flexible applications for biological and non-biological force sensing. |
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| AbstractList | This paper presents three-axis micro strain gauge force-sensitive pillar arrays constructed of multiple layers of SU-8 and metal on quartz substrates to create transparent sensors for use in standard inverted microscopes. The sensor meets specific requirements for measuring tactile sensitivity and forces exerted during locomotion by small organisms such as fruit flies ( Drosophila melanogaster ), including: 1μN force sensitivity, >25μN range, and bio-compatibility By virtue of its three-axis capability, this sensor has flexible applications for biological and non-biological force sensing. |
| Author | Harjee, N. Kwon, R. Klejwa, N. Pruitt, B.L. Coulthard, S.M. |
| Author_xml | – sequence: 1 givenname: N. surname: Klejwa fullname: Klejwa, N. organization: Stanford Univ., Stanford – sequence: 2 givenname: N. surname: Harjee fullname: Harjee, N. organization: Stanford Univ., Stanford – sequence: 3 givenname: R. surname: Kwon fullname: Kwon, R. – sequence: 4 givenname: S.M. surname: Coulthard fullname: Coulthard, S.M. – sequence: 5 givenname: B.L. surname: Pruitt fullname: Pruitt, B.L. |
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| Snippet | This paper presents three-axis micro strain gauge force-sensitive pillar arrays constructed of multiple layers of SU-8 and metal on quartz substrates to create... |
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| SubjectTerms | Adhesives Biosensors Capacitive sensors Chromium Force measurement Force Sensor Force sensors Gold Mechanical sensors Sensor arrays Strain Gauge Strain measurement SU-8 |
| Title | Transparent SU-8 Three-Axis Micro Strain Gauge Force Sensing Pillar Arrays for Biological Applications |
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