Multi-wavelength Reflectivity Monitoring on Growth of AlN on Si
Analysis of oscillation of reflectivity on thin film growth at a wavelength the film is transparent results in more than one solution of growth rate sometimes. Usually, the correct growth rate is chosen among the solutions with knowledge of refractive index of the film. On the other hand, if the ref...
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| Published in: | 2019 Compound Semiconductor Week (CSW) pp. 1 - 2 |
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| Main Authors: | , , , |
| Format: | Conference Proceeding |
| Language: | English |
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IEEE
01-05-2019
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| Abstract | Analysis of oscillation of reflectivity on thin film growth at a wavelength the film is transparent results in more than one solution of growth rate sometimes. Usually, the correct growth rate is chosen among the solutions with knowledge of refractive index of the film. On the other hand, if the reflectivity is monitored at two or more wavelengths, the correct solution is chosen by comparing the solutions at different wavelengths. In this report, an example of AlN growth on Si substrate is shown. |
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| AbstractList | Analysis of oscillation of reflectivity on thin film growth at a wavelength the film is transparent results in more than one solution of growth rate sometimes. Usually, the correct growth rate is chosen among the solutions with knowledge of refractive index of the film. On the other hand, if the reflectivity is monitored at two or more wavelengths, the correct solution is chosen by comparing the solutions at different wavelengths. In this report, an example of AlN growth on Si substrate is shown. |
| Author | Tsukui, Masayuki Takahashi, Hideshi Miyano, Kiyotaka Iyechika, Yasushi |
| Author_xml | – sequence: 1 givenname: Yasushi surname: Iyechika fullname: Iyechika, Yasushi organization: NuFlare Technology, Inc., 8-1 Shinsugita, Isogo, Yokahama, Japan – sequence: 2 givenname: Masayuki surname: Tsukui fullname: Tsukui, Masayuki organization: NuFlare Technology, Inc., 8-1 Shinsugita, Isogo, Yokahama, Japan – sequence: 3 givenname: Kiyotaka surname: Miyano fullname: Miyano, Kiyotaka organization: NuFlare Technology, Inc., 8-1 Shinsugita, Isogo, Yokahama, Japan – sequence: 4 givenname: Hideshi surname: Takahashi fullname: Takahashi, Hideshi organization: NuFlare Technology, Inc., 8-1 Shinsugita, Isogo, Yokahama, Japan |
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| Snippet | Analysis of oscillation of reflectivity on thin film growth at a wavelength the film is transparent results in more than one solution of growth rate sometimes.... |
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| SubjectTerms | AlN on Si multi-wavelength reflectivity monitoring |
| Title | Multi-wavelength Reflectivity Monitoring on Growth of AlN on Si |
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