Thermal based flow sensor with nearly zero temperature dependence and MID-based flow channel

Thermal based flow sensor with nearly zero temperature dependence and MID-based flow channel

For the first time, a resistance based flow sensor is presented, which shows nearly zero temperature dependence in the flow output signal without the need of complex compensation, due to both the unique sensor design and a new packaging technology approach. The improvements are achieved by designing...

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Bibliographic Details
Published in:2017 IEEE 30th International Conference on Micro Electro Mechanical Systems (MEMS) pp. 1005 - 1008
Main Authors: Krogmann, Florian T., Hepp, Christoph J., Lehmann, Mirko, Holoubek, Jiri
Format: Conference Proceeding
Language:English
Published: IEEE 01-01-2017
Subjects:
Bridge circuits
Fluids
Heating
Resistance
Temperature measurement
Temperature sensors
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Summary:For the first time, a resistance based flow sensor is presented, which shows nearly zero temperature dependence in the flow output signal without the need of complex compensation, due to both the unique sensor design and a new packaging technology approach. The improvements are achieved by designing a full Wheatstone bridge out of four platinum resistors and driving the sensor with a constant current source. Moreover, a Molded-interconnected-device (MID) fabricated housing is introduced, defining a highly reproducible flow channel and allowing an easy integration into systems by simply soldering the sensor system to a Printed Circuit Board (PCB).
DOI:10.1109/MEMSYS.2017.7863581