Characterization of PT thin films deposited by DC sputtering at different temperatures on Ti/glass and TiO2/Si substrates

Pt thin films were deposited on Ti/Glass and TiO 2 /Si substrates by DC sputtering at temperatures between room and 700°C to optimize its performance as electrodes for ferroelectric devices. Well oriented films in the (111) direction were obtained. Auger electron spectroscopy showed the presence of...

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Bibliographic Details
Published in:	Ferroelectrics Vol. 225; no. 1; pp. 319 - 325
Main Authors:	Cruz, Ma de la Paz, Siqueiros, Jesús M., Valenzuela, Jose, Machorro, Roberto, Portelles, Jorge J., Fundora, Abel
Format:	Journal Article
Language:	English
Published:	Taylor & Francis Group 01-03-1999
Subjects:	ferroelectric electrodes platinum
Online Access:	Get full text
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