Notice of Removal: Temperature behavior of sound velocity of SiON thin films studied by picosecond ultrasound

Notice of Removal: Temperature behavior of sound velocity of SiON thin films studied by picosecond ultrasound

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Bibliographic Details
Published in:2017 IEEE International Ultrasonics Symposium (IUS) p. 1
Main Authors: Tsuboi, Seiya, Ogi, Hirotsugu, Nagakubo, Akira, Nakamura, Nobutomo, Matsuda, Satoru, Kabe, Yoshiro
Format: Conference Proceeding
Language:English
Japanese
Published: IEEE 01-09-2017
Online Access:Get full text
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Description
ISSN:1948-5727
DOI:10.1109/ULTSYM.2017.8092986