Application of cathodoluminescence microscopy to the study of native acceptors in gallium antimonide

Cathodoluminescence in the scanning electron microscope is used to investigate growth and process induced defects in GaSb crystals. In particular, luminescence emission has been used to study the nature of acceptor defects present after different annealing and irradiation treatments.

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Bibliographic Details
Published in:	1996 International Semiconductor Conference. 19th Edition. CAS'96 Proceedings Vol. 2; pp. 497 - 506 vol.2
Main Authors:	Piqueras, J., Mendez, B., Panin, G.N., Dutta, P.S., Dieguez, E.
Format:	Conference Proceeding
Language:	English
Published:	IEEE 1996
Subjects:	Annealing Atmosphere Doping Electron beams Gallium compounds Human computer interaction Microscopy Milling Substrates Temperature
Online Access:	Get full text
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