MEMS optimization using genetic algorithms

• Published in: 2004 International Semiconductor Conference. CAS 2004 Proceedings (IEEE Cat. No.04TH8748) Vol. 2; pp. 475 - 478 vol.2
• Main Authors: Leu, G., Simion, S., Serbanescu, A.
• Format: Conference Proceeding
• Language: English
• Published: Piscataway NJ IEEE 2004
• Subjects: Applied sciences; Capacitance; Differential equations; Electronics; Erbium; Exact sciences and technology; Frequency; Genetic algorithms; Micro- and nanoelectromechanical devices (mems/nems); Micromechanical devices; Microwave devices; Optimization methods; Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices; Switches; Switching circuits; Switching time; Capacitance; Genetic algorithm; Evolutionary algorithm; Microelectromechanical device; Optimization
• ISBN: 9780780384996; 0780384997
• DOI: 10.1109/SMICND.2004.1403052

Using genetic algorithms, an original method for MEMS optimization is proposed in This work. The optimized MEMS device should provide both minimum switching time and minimum equivalent capacitance, so the highest operating frequency is obtained. By analyzing the results obtained on the switching time for different operating voltage and geometrical configurations, it is important to mention that by using GA, the MEMS behavior is in good agreement with the expected results obtained by classical means.