Long time stability of electrical contact base on ruthenium nanoscale films at various coating roughness

Long time stability of electrical contact base on ruthenium nanoscale films at various coating roughness

The paper contains results of researches on switching properties of contact coatings based on nanoscale ruthenium films obtained by the electrochemical deposition method. Dependences of contact resistance changes on a number of switching cycles under various thicknesses and roughness of the coating...

Full description

Saved in:
Bibliographic Details
Published in:2015 IEEE 1st International Forum on Research and Technologies for Society and Industry Leveraging a better tomorrow (RTSI) pp. 39 - 43
Main Authors: Karabanov, Sergey M., Suvorov, Dmitry V., Gololobov, Gennady P., Gurov, Viktor S., Tarabrin, Dmitry Y., Slivkin, Evgeny V.
Format: Conference Proceeding
Language:English
Published: IEEE 01-09-2015
Subjects:
Coatings
Contact resistance
electric contacts
erosion-resistant coatings
MEMS-switches
Rough surfaces
Ruthenium
Surface roughness
Surface treatment
Switches
Online Access:Get full text
Tags: Add Tag
No Tags, Be the first to tag this record!
Description
Summary:The paper contains results of researches on switching properties of contact coatings based on nanoscale ruthenium films obtained by the electrochemical deposition method. Dependences of contact resistance changes on a number of switching cycles under various thicknesses and roughness of the coating have been determined. The experiment results have determined optimal parameters of the contact coating necessary for provision of a minimal value of the MEMS-switch contact resistance in the steady mode.
DOI:10.1109/RTSI.2015.7325069