Increase of the magnetic sensitivity of magnetically controlled MEMS switches

• Published in: 2015 73rd Annual Device Research Conference (DRC) pp. 113 - 114
• Main Authors: Karabanov, Sergey M., Suvorov, Dmitriy V., Gololobov, Gennadiy P., Tarabrin, Dmitriy Yu, Slivkin, Evgeniy V.
• Format: Conference Proceeding
• Language: English
• Published: IEEE 01-06-2015
• Subjects: Acceleration; Resistance; Switches
• ISBN: 9781467381345; 1467381349
• ISSN: 1548-3770; 2640-6853
• DOI: 10.1109/DRC.2015.7175581

Summary form only given. Results of the fulfilled calculations have shown that the design with a moving magnetic beam and a fixed magnetic field concentrator provides an increase of the magnetic sensitivity approximately in 2 times in comparison to the design without concentrators, besides inertial resistance of the switch does not change. It allows stating that usage of magnetic concentrators is an effective method of the magnetically operated MEMS-switches operating characteristics increase. It was shown that usage of crank torsion anchors for the ferromagnetic beam mounting is also an effective method of the magnetic sensitivity increase providing possibility to decrease of mechanical stress caused by the commutation.